The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 28, 2007
Filed:
Feb. 22, 2006
Jeffrey F. Denatale, Thousand Oaks, CA (US);
Philip A. Stupar, Oxnard, CA (US);
Chialun Tsai, Thousand Oaks, CA (US);
Robert L. Borwick, Iii, Thousand Oaks, CA (US);
Jeffrey F. DeNatale, Thousand Oaks, CA (US);
Philip A. Stupar, Oxnard, CA (US);
Chialun Tsai, Thousand Oaks, CA (US);
Robert L. Borwick, III, Thousand Oaks, CA (US);
Teledyne Licensing, LLC, Thousand Oaks, CA (US);
Abstract
A micromirror apparatus includes a device layer having a recess, a multilayer thin-film dielectric reflector coupled to and structurally supported by the device layer on the opposite side of the device layer from said recess, and a stress compensator seated in the recess, with the stress compensator operable to resist device layer bending moments resulting from intrinsic and thermal mismatch stresses between the multilayer thin-film dielectric reflector and the device layer.