The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 28, 2007
Filed:
Aug. 02, 2004
Charles Michael Birtcher, Valley Center, CA (US);
Richard J. Dunning, Fallbrook, CA (US);
Robert Daniel Clark, San Marcos, CA (US);
Arthur Kenneth Hochberg, Solana Beach, CA (US);
Thomas Andrew Steidl, Escondido, CA (US);
Charles Michael Birtcher, Valley Center, CA (US);
Richard J. Dunning, Fallbrook, CA (US);
Robert Daniel Clark, San Marcos, CA (US);
Arthur Kenneth Hochberg, Solana Beach, CA (US);
Thomas Andrew Steidl, Escondido, CA (US);
Air Products and Chemicals, Inc., Allentown, PA (US);
Abstract
Vessel and method for the production and delivery of a precursor-containing fluid stream comprising the gaseous phase of a precursor material are disclosed herein. In one aspect, there is provided an vessel comprising: an interior volume wherein the interior volume is segmented into an upper volume and a lower volume wherein the upper volume and the lower volume are in fluid communication; a lid comprising a fluid inlet, a fluid outlet, an optional fill port, and an internal recess wherein at least a portion of the upper volume resides within the internal recess; a sidewall interposed between the lid and a base; and at least one protrusion that extends into the lower volume wherein the precursor is in contact with the at least one protrusion and wherein at least one protrusion extends from at least one selected from the lid, the sidewall, the base, and combinations thereof.