The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 21, 2007
Filed:
May. 25, 2005
Applicants:
Pawan Kumar Nimmakayala, Austin, TX (US);
Sidlgata V. Sreenivasan, Austin, TX (US);
Inventors:
Pawan Kumar Nimmakayala, Austin, TX (US);
Sidlgata V. Sreenivasan, Austin, TX (US);
Assignee:
Board of Regents, The Universtiy of Texas System, Austin, TX (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/58 (2006.01); G03B 27/62 (2006.01); G03B 27/32 (2006.01);
U.S. Cl.
CPC ...
Abstract
The present invention includes a method for supporting a substrate that features a chuck body having a body surface with a pin extending therefrom having a contact surface lying in a plane, with the pin being movably coupled to the chuck body to move with respect to the plane. To that end, the method includes disposing the substrate upon two spaced-apart bodies; and moving one of the two spaced-apart bodies away from the substrate.