The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 21, 2007
Filed:
Jul. 15, 2004
Srivatsa Kundalgurki, Dresden, DE;
Srivatsa Kundalgurki, Dresden, DE;
Infineon Technologies AG, Munich, DE;
Abstract
Integrated circuits can include an integrated capacitor with a metal alloy layer. Methods for forming such integrated circuits can include providing a substrate, forming a first electrode including depositing a metal alloy layer having a first surface and an exposed second surface, etching the exposed second surface of the metal alloy layer thereby increasing the surface roughness of the second surface of the metal alloy layer, forming a capacitor dielectric on the first electrode and forming a second electrode on the capacitor dielectric. By providing a metal alloy layer and etching the second surface of the metal alloy layer, an increased capacitance of the integrated capacitor is achieved.