The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 21, 2007
Filed:
Mar. 23, 2006
Randall Lee, Aurora, OH (US);
Thomas Owen Mitchell, Fort Collins, CO (US);
Johannes Jacobus Lambertus Mulders, Eindhoven, NL;
Randall Lee, Aurora, OH (US);
Thomas Owen Mitchell, Fort Collins, CO (US);
Johannes Jacobus Lambertus Mulders, Eindhoven, NL;
FEI Company, Hillsboro, OR (US);
Abstract
A nanostructure is fabricated using charged particle deposition to deposit a catalyst on a substrate. A charged particle beam is directed to location on the substrate where the catalyst is to be deposited, with a beam-activated precursor gas also being directed to the location. For example, a nickel dot can be selectively deposited onto a substrate by using a charged particle beam to decompose a nickel-containing precursor gas, and then a carbon nanotube can be grown on the nickel dot, with the diameter of the nanotube conforming to the size of the nickel dot.