The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 14, 2007
Filed:
May. 11, 2005
William T. Conner, Natick, MA (US);
Craig Garvin, Somerville, NY (US);
Steven J. Lakeman, Newbury Park, CA (US);
Igor Tepermeister, Waban, MA (US);
Chenglong Yang, San Jose, CA (US);
William T. Conner, Natick, MA (US);
Craig Garvin, Somerville, NY (US);
Steven J. Lakeman, Newbury Park, CA (US);
Igor Tepermeister, Waban, MA (US);
Chenglong Yang, San Jose, CA (US);
Inficon, Inc., East Syracuse, NY (US);
Abstract
A method of monitoring a microelectronic manufacturing process includes the implementation of a monitoring sensor that is configured to operate in an inter-process mode. During an inter-process mode, a first valve is opened in order to initiate transfer of a processing substrate between at least one processing chamber and a transfer chamber. The monitoring sensor is programmed to monitor the interior of the at least one processing chamber only after the first valve is opened.