The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 14, 2007
Filed:
Aug. 16, 2004
Applicants:
Shekhar Bhansali, Tampa, FL (US);
Abdu Rub Abdur, Temple Terrace, FL (US);
Sunny Kedia, Tampa, FL (US);
Inventors:
Shekhar Bhansali, Tampa, FL (US);
Abdu Rub Abdur, Temple Terrace, FL (US);
Sunny Kedia, Tampa, FL (US);
Assignee:
University of South Florida, Tampa, FL (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
B44C 1/22 (2006.01);
U.S. Cl.
CPC ...
Abstract
The present invention illustrates a bulk silicon etching technique that yields straight sidewalls, through wafer structures in very short times using standard silicon wet etching techniques. The method of the present invention employs selective porous silicon formation and dissolution to create high aspect ratio structures with straight sidewalls for through wafer MEMS processing.