The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 07, 2007
Filed:
Aug. 02, 2006
Neil Benjamin, Austin, TX (US);
Richard Alan Gottscho, Pleasanton, CA (US);
Nicolas Bright, San Jose, CA (US);
Robert Steger, San Jose, CA (US);
Neil Benjamin, Austin, TX (US);
Richard Alan Gottscho, Pleasanton, CA (US);
Nicolas Bright, San Jose, CA (US);
Robert Steger, San Jose, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
A method of component management in a substrate processing system is disclosed. The substrate processing system has a set of components, at least a plurality of components of the set of components being designated to be smart components, each component of the plurality of components having an intelligent component enhancement (ICE). The method includes querying the plurality of components to request their respective unique identification data from their respective ICEs. The method further includes receiving unique identification data from the plurality of components if any of the plurality of components responds to the querying. The method additionally includes flagging the first component for corrective action if a first component of the plurality of components fails to provide first component unique identification data when the first component identification data is expected.