The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 07, 2007
Filed:
Jan. 30, 2006
Robert Gregory Wolf, Hackettstown, NJ (US);
Christopher Morath, Morristown, NJ (US);
Robin Mair, Wintersprings, FL (US);
Robert Gregory Wolf, Hackettstown, NJ (US);
Christopher Morath, Morristown, NJ (US);
Robin Mair, Wintersprings, FL (US);
Rudolph Technologies, Inc., Flanders, NJ (US);
Abstract
A photoacoustic system with ellipsometer, where the ellipsometer includes a laser light source for generating an incident beam, an element for focusing the incident beam on a sample, a unit for measuring the change in amplitude of the incident beam on reflection and a unit for measuring the phase difference of the incident beam on reflection. The system further includes an element to convert an input narrow spectrum beam generated by the laser light source to a broadband sample measurement beam that is focused onto the sample.