The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 07, 2007
Filed:
Dec. 12, 2003
Applicants:
Jürgen Frosien, Riemerling, DE;
Pavel Adamec, Haar, DE;
Inventors:
Jürgen Frosien, Riemerling, DE;
Pavel Adamec, Haar, DE;
Assignee:
ICT Integrated Circuit Testing Gesellschaft, Heimstetten, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 3/07 (2006.01); H01J 29/51 (2006.01);
U.S. Cl.
CPC ...
Abstract
The invention provides an optical system for a charged particle multi-beam system. The optical system comprises an electrostatic lens component and a magnetic lens component. The components are used to focus a plurality of charged particle beams in a separate opening for each of at least a plurality a charged particle beams traveling through the optical system.