The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 31, 2007
Filed:
Apr. 29, 2005
Applicants:
William Clay Schluchter, Los Altos, CA (US);
Robert Todd Belt, Mountain View, CA (US);
Inventors:
William Clay Schluchter, Los Altos, CA (US);
Robert Todd Belt, Mountain View, CA (US);
Assignee:
Agilent Technologies, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 9/02 (2006.01);
U.S. Cl.
CPC ...
Abstract
An interferometer is provided that minimizes the introduction of non-linear errors into displacement measurements. In one embodiment, non-linear errors are reduced by isolating reference and measurement beams over most of their respective optical paths leading to the detector, and by employing a separate amplitude-splitting non-polarizing optical beam splitter for each beam input into the interferometer. Additionally, the interferometer is scalable to an arbitrary number of optical axes or inputs.