The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 31, 2007
Filed:
Jun. 09, 2006
Ron A. Peters, Tigard, OR (US);
Leonard A. Hayden, Beaverton, OR (US);
Jeffrey A. Hawkins, Portland, OR (US);
R. Mark Dougherty, Aloha, OR (US);
Ron A. Peters, Tigard, OR (US);
Leonard A. Hayden, Beaverton, OR (US);
Jeffrey A. Hawkins, Portland, OR (US);
R. Mark Dougherty, Aloha, OR (US);
Cascade Microtech, Inc., Beaverton, OR (US);
Abstract
A probe station for probing a test device has a chuck element for supporting the test device. An electrically conductive outer shield enclosure at least partially encloses such chuck element to provide EMI shielding therefor. An electrically conductive inner shield enclosure is interposed between and insulated from the outer shield enclosure and the chuck element, and at least partially encloses the chuck element.