The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 24, 2007
Filed:
Sep. 24, 2001
Applicants:
Markus Weiss, Aalen, DE;
Wolfgang Singer, Aalen, DE;
Bernd Kleemann, Aalen, DE;
Inventors:
Assignee:
Carl Zeiss SMT AG, Oberkochen, DE;
Primary Examiner:
Int. Cl.
CPC ...
G21K 5/04 (2006.01); G21K 1/06 (2006.01); G02B 27/44 (2006.01);
U.S. Cl.
CPC ...
Abstract
An illumination system, particularly for wavelengths ≦100 nm, with an object plane and a field plane, comprises a grating element and a physical diaphragm in a diaphragm plane, which is arranged downstream to the grating element in the beam path from the object plane to the field plane.