The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 24, 2007
Filed:
Feb. 25, 2005
Applicants:
William Roberts, Mechanicsville, VA (US);
Gerhard Kunkel, Dresden, DE;
Patrick Lomtscher, Dresden, DE;
Karl Schumacher, Radebeul, DE;
Inventors:
William Roberts, Mechanicsville, VA (US);
Gerhard Kunkel, Dresden, DE;
Patrick Lomtscher, Dresden, DE;
Karl Schumacher, Radebeul, DE;
Assignee:
Infineon Technologies AG, Munich, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/88 (2006.01); G01B 11/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
An inspection system includes an illumination source configured to illuminate a blazed phase grating sample, image collection pathways and an imaging system configured to capture an image of a sample point of the blazed phase grating sample, and a controller configured to adjust the illumination source in response to an analysis of the image of the sample point to determine illumination uniformity of the inspection system.