The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 24, 2007
Filed:
Aug. 02, 2005
Takehiko Suzuki, Saitama, JP;
Hideki Ina, Kanagawa, JP;
Koichi Sentoku, Tochigi, JP;
Satoru Oishi, Tochigi, JP;
Takehiko Suzuki, Saitama, JP;
Hideki Ina, Kanagawa, JP;
Koichi Sentoku, Tochigi, JP;
Satoru Oishi, Tochigi, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
An exposure method for projecting a pattern formed on a reflection plate onto a substrate, via a projection optical system, using extreme ultraviolet light. The method includes a detection step of detecting a relative position between a second mark formed on a plate holding unit for holding the reflection plate and a third mark formed on the reflection plate. The detection step includes sub-steps of (i) detecting light reflected from the second mark with a detector, (ii) detecting light reflected from the third mark with the detector, and (iii) changing a relative position between the plate holding unit and the detector between sub-steps (i) and (ii).