The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 24, 2007
Filed:
May. 06, 2004
Jerwei Hsieh, Sanchong, TW;
Huai-yuan Chu, Shulin, TW;
Julius Ming-lin Tsai, Taipei, TW;
Weileun Fang, Hsinchu, TW;
Jerwei Hsieh, Sanchong, TW;
Huai-Yuan Chu, Shulin, TW;
Julius Ming-Lin Tsai, Taipei, TW;
Weileun Fang, Hsinchu, TW;
Walsin Lihwa Corporation, Taipei, TW;
Abstract
A selective etching method with lateral protection function is provided. The steps includes: (a) providing a substrate; (b) forming a plurality of tunnels; (c) forming a lateral strengthening structure at a peripheral wall of the tunnels; (d) removing a bottom portion of the lateral strengthening structure, and a part of the substrate by an etching process so as to form a lower structure and expose an unstrengthened structure; and (f) etching the unstrengthened structure laterally so as to form an upper structure.