The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 24, 2007
Filed:
Mar. 16, 2004
Shogo Sarumaru, Takasago, JP;
Hideshi Yamane, Takasago, JP;
Katsumi Watanabe, Takasago, JP;
Hiroyuki Ueno, Kyoto, JP;
Hideki Adachi, Kyoto, JP;
Eiji Fukatsu, Kyoto, JP;
Shogo Sarumaru, Takasago, JP;
Hideshi Yamane, Takasago, JP;
Katsumi Watanabe, Takasago, JP;
Hiroyuki Ueno, Kyoto, JP;
Hideki Adachi, Kyoto, JP;
Eiji Fukatsu, Kyoto, JP;
Kabushiki Kaisha Kobe Seiko Sho, Kobe-shi, JP;
Dainippon Screen Mfg. Co., Ltd., Kyoto-shi, JP;
Abstract
A transferring apparatus transfers an article to be processed, which is carried by a carrier device, to a holder provided in a processing chamber defined by a processing vessel and adapted to hold the article at a specified processing position. The transferring apparatus includes a temporarily holding member, and transfers the article from the intermediate position to the processing position after receiving the article carried by the carrier device at an intermediate position distanced from the holder and temporarily holding it. The temporarily holding member is retracted to a position in the outside of the processing vessel after the article is transferred.