The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 24, 2007
Filed:
Sep. 08, 2004
Andreas Seifert, Aalen, DE;
Markus Weiss, Aalen, DE;
Andreas Heisler, Steinheim, DE;
Stefan Dornheim, Heidenheim, DE;
Andreas Seifert, Aalen, DE;
Markus Weiss, Aalen, DE;
Andreas Heisler, Steinheim, DE;
Stefan Dornheim, Heidenheim, DE;
Carl Zeiss SMT AG, Oberkocken, DE;
Abstract
In a method for the production of a facetted mirrorhaving a plurality of mirror facetsand', which have mirror surfacesand are fitted into reception bores′ of a support platethe mirror facets′ are made in a first method step. At least one of the mirror facets is fitted into the associated reception bore of the support plate in a second method step, after which the ACTUAL position of the optical axis of at least one mirror surface of an associated mirror facet′ fitted into the support plate is respectively determined in a third step and compared with a SET position of a predetermined optical axis. Knowing the measured values determined for the at least one mirror facet′ in the third method step, reprocessing of the mirror facet and/or of the reception bore is subsequently carried out in a further method step if there is an angular deviation between the ACTUAL position and the SET position.