The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 17, 2007
Filed:
Jun. 09, 2004
Kazuhiro Miyakawa, Tokyo, JP;
Yoichiro Iwa, Tokyo, JP;
Akihiko Sekine, Tokyo, JP;
Kabushiki Kaisha Topcon, Tokyo, JP;
Abstract
A surface inspection apparatus includes an LD (for emitting a laser beam (L), an irradiation optical system for entering the emitted laser beam (L) onto an inspection surface () of a wafer at predetermined depression angle (α), a scanning device () to displace the wafer () in order for the laser beam (L) scans the inspection surface () in a spiral, an light intensity detecting device () to detect light intensity, and a scattered light detecting optical system () for guiding scattered light (L) emitted from an irradiation area () in which the laser beam (L) is entered. The light intensity detecting device () includes a multianode PMT () for detecting the light intensity by decomposing the scattered light (L) into 10 channels (ch) in a one-dimensional direction (Y axis direction).