The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 17, 2007
Filed:
Oct. 04, 2005
Wolfgang Singer, Aalen, DE;
Wilhelm Egle, Aalen, DE;
Markus Weiss, Aalen, DE;
Joachim Hainz, Aalen, DE;
Jochen Wietzorrek, Aalen, DE;
Frank Melzer, Utzmemmingen, DE;
Johannes Wangler, Königsbronn, DE;
Wolfgang Singer, Aalen, DE;
Wilhelm Egle, Aalen, DE;
Markus Weiss, Aalen, DE;
Joachim Hainz, Aalen, DE;
Jochen Wietzorrek, Aalen, DE;
Frank Melzer, Utzmemmingen, DE;
Johannes Wangler, Königsbronn, DE;
Carl Zeiss SMT AG, Oberkochen, DE;
Abstract
There is provided a collector for illumination systems for light having a wavelength ≦193 nm comprising. The collector includes (a) a first mirror shell adjacent to, and positioned inside of, a second mirror shell around a common axis of rotation, in which the first and second mirror shells are rotationally symmetric, and (b) a component in a region between the first and second mirror shells. The collector is for receiving the light from a light source via an object-side aperture and for illuminating an area in an image-side plane, and the region is not used by the light.