The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 17, 2007
Filed:
Jun. 27, 2003
Recai Sezi, Röttenbach, DE;
Andreas Walter, Egloffstein, DE;
Anna Maltenberger, Leutenbach, DE;
Klaus Lowack, Erlangen, DE;
Marcus Halik, Erlangen, DE;
Recai Sezi, Röttenbach, DE;
Andreas Walter, Egloffstein, DE;
Anna Maltenberger, Leutenbach, DE;
Klaus Lowack, Erlangen, DE;
Marcus Halik, Erlangen, DE;
Infineon Technologies AG, Munich, DE;
Abstract
A dielectric for aluminum and copper metalizations is stable at high temperatures. Surprisingly, in spite of the elimination of water during the cyclization, the polymeric dielectrics are very suitable for filling narrow trenches. The filled trenches exhibit no defects and bubbles or cracks. The polybenzoxazoles have dielectric constants of k≦2.7 and are suitable as an electrical insulator. Furthermore, these materials adhere very well on all surfaces relevant for micro-electronics.