The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 17, 2007
Filed:
Jan. 18, 2002
Applicants:
Nobuo Ishii, Hyogo, JP;
Makoto Ando, Kanagawa 211-0954, JP;
Masaharu Takahashi, Chiba 276-0049, JP;
Inventors:
Assignees:
Tokyo Electron Limited, Tokyo, JP;
Other;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); C23F 1/00 (2006.01); H01L 21/306 (2006.01);
U.S. Cl.
CPC ...
Abstract
A plasma device includes a slot antenna () for supplying a high frequency electromagnetic field (F) supplied through a feeding part into a processing vessel (). The feeding part has a cavity () for forming a resonator and converting the fed high frequency electromagnetic field (F) into a rotating electromagnetic field and supplying the rotating electromagnetic field to the slot antenna ().