The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 7241552 B1

PDF
Full Text
Expired
Date of Patent:
Jul. 10, 2007

Filed:

Aug. 03, 2004
Applicants:

Kwang-sub Yoon, Seoul, KR;

Dong-won Jung, Yongin, KR;

Si-hyeung Lee, Suwon, KR;

Hyun-woo Kim, Sungnam, KR;

Sook Lee, Seoul, KR;

Sang-gyun Woo, Suwon, KR;

Sang-jun Choi, Seoul, KR;

Inventors:

Kwang-sub Yoon, Seoul, KR;

Dong-won Jung, Yongin, KR;

Si-hyeung Lee, Suwon, KR;

Hyun-woo Kim, Sungnam, KR;

Sook Lee, Seoul, KR;

Sang-gyun Woo, Suwon, KR;

Sang-jun Choi, Seoul, KR;

Assignee:

Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-do, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01);
U.S. Cl.
CPC ...
Abstract

A resist composition includes a photoacid generator (PAG) and a photosensitive polymer. The photosensitive polymer is polymerized with (a) at least one of the monomers having the respective formulae: where R1 and R2 are independently a hydrogen atom, alkyl, hydroxyalkyl, alkyloxy, carbonyl or ester, and x and y are independently integers from 1 to 6, and (b) at least one of a (meth)acrylate monomer, a maleic anhydride monomer, and a norbornene monomer.


Find Patent Forward Citations

Yoon, Kwang-sub. (2007). Resist composition comprising photosensitive polymer having lactone in its backbone (U.S. Patent No. 7241552). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7241552

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