The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 03, 2007
Filed:
Feb. 22, 2005
Johannes Rau, Gerstetten, DE;
Armin Schoeppach, Aalen, DE;
Ulrich Weber, Ulm, DE;
Carl Zeiss SMT AG, Oberkochen, DE;
Abstract
An objective () with at least one optical element (), which is mounted in an inner ring (). The inner ring () is connected to an outer mount (). A manipulator () is provided for displacing the optical element () in at least a direction perpendicular to an optical axis. The inner ring () is connected to the outer mount () by means of at least two adjusting joints () with manipulators () and at least one swivel joint (). The at least two adjusting joints () and the at least one swivel joint () are provided with joint arms () extending at least approximately in a tangential direction with respect to the inner ring (), by means of which arms the inner ring () is elastically connected to the outer mount (). The ends of the joint arms () are articulated on the inner ring () in such a way that temperature-induced changes in length of the joint arms () are converted into a uniform turning direction of the inner ring () with respect to the outer mount () about the center of the optical element.