The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 7235516 B1

PDF
Full Text
Expired
Date of Patent:
Jun. 26, 2007

Filed:

Nov. 15, 2002
Applicants:

Hitoshi Morinaga, Fukuoka, JP;

Hideaki Mochizuki, Fukuoka, JP;

Atsushi Itou, Fukuoka, JP;

Inventors:

Hitoshi Morinaga, Fukuoka, JP;

Hideaki Mochizuki, Fukuoka, JP;

Atsushi Itou, Fukuoka, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C11D 3/395 (2006.01); C11D 7/06 (2006.01); C11D 1/72 (2006.01);
U.S. Cl.
CPC ...
Abstract

A substrate surface cleaning liquid medium and a cleaning method using the cleaning liquid medium are capable of removing finely particulate contaminants more efficiently than conventional techniques from substrates for devices in the production of semiconductor devices, display devices, etc., which cleaning liquid medium contains the following ingredients (A), (B), (C), and (D), has a pH of 9 or higher, and a content of ingredient (C) of 0.01 to 4% by weight:


Find Patent Forward Citations

Morinaga, Hitoshi. (2007). Semiconductor cleaning composition comprising an ethoxylated surfactant (U.S. Patent No. 7235516). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7235516

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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