The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 26, 2007
Filed:
May. 22, 2003
Applicants:
Bang-chein Ho, Hsin-chu, TW;
Jian-hong Chen, Hsin-chu, TW;
Yusuke Takano, Tokyo, JP;
Ping-hung LU, Bridgewater, NJ (US);
Inventors:
Bang-Chein Ho, Hsin-chu, TW;
Jian-Hong Chen, Hsin-chu, TW;
Yusuke Takano, Tokyo, JP;
Ping-Hung Lu, Bridgewater, NJ (US);
Assignee:
Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/26 (2006.01);
U.S. Cl.
CPC ...
Abstract
In accordance with the objectives of the invention a new water soluble negative photoresist is provided for packing-and-unpacking (PAU) processing steps.