The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 19, 2007
Filed:
May. 29, 2003
Morito Akiyama, Tosu, JP;
Naohiro Ueno, Tosu, JP;
Hiroshi Tateyama, Tosu, JP;
Yoshitaka Sunagawa, Kyoto, JP;
Yoshihiro Umeuchi, Kyoto, JP;
Keiichiro Jinushi, Toshima-ku, JP;
Morito Akiyama, Tosu, JP;
Naohiro Ueno, Tosu, JP;
Hiroshi Tateyama, Tosu, JP;
Yoshitaka Sunagawa, Kyoto, JP;
Yoshihiro Umeuchi, Kyoto, JP;
Keiichiro Jinushi, Toshima-ku, JP;
Abstract
The present invention has an objective to provide a high performance piezoelectric element in which is formed an aluminum nitride thin film free from hillocks, cracks, and peeling which exhibits superhigh c-axis orientation, by forming a bottom electrode from a W layer with no intervening adhesive layer on a glass or other cheap substrate. The piezoelectric element of the present invention is a piezoelectric element using a superhigh-oriented aluminum nitride thin film characterized in that the piezoelectric element is free from hillocks, cracks, and peeling and includes a stack structure in which a bottom electrode, a piezoelectric body thin film, and a top electrode are sequentially formed on a substrate; the bottom electrode is made of an oriented W layer of which a (111) plane of W is parallel to a surface of the substrate; and the piezoelectric body thin film is formed of a c-axis-oriented aluminum nitride thin film having a rocking curve full width half maximum (RCFWHM) not exceeding 2.5°.