The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 12, 2007
Filed:
Aug. 23, 2005
Min-su Fung, Lagrangeville, NY (US);
Roger L. Verkuil, Wappinger Falls, NY (US);
Gregory S. Horner, Santa Clara, CA (US);
William H. Howland, Cortland, OH (US);
Min-Su Fung, Lagrangeville, NY (US);
Roger L. Verkuil, Wappinger Falls, NY (US);
Gregory S. Horner, Santa Clara, CA (US);
William H. Howland, Cortland, OH (US);
KLA-Tencor Corporation, San Jose, CA (US);
Abstract
Corona charges are used to bias a wafer to push down mobile charges and then pull them up during temperature cycles. Mobile charge is measured from the drops in the corona voltage due to the mobile charges. Corrections are made in the measurements for dipole potentials, leakage and silicon band-bending.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile