The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 12, 2007
Filed:
Sep. 22, 2005
Martinus Arnoldus Henricus Terken, Lierop, NL;
Hernes Jacobs, Eindhoven, NL;
Harmen Klaas Van Der Schoot, Vught, NL;
Petrus Matthijs Henricus Vosters, Bladel, NL;
Koen Jacobus Johannes Maria Zaal, Eindhoven, NL;
Martinus Arnoldus Henricus Terken, Lierop, NL;
Hernes Jacobs, Eindhoven, NL;
Harmen Klaas Van Der Schoot, Vught, NL;
Petrus Matthijs Henricus Vosters, Bladel, NL;
Koen Jacobus Johannes Maria Zaal, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A movable carriage for moving an article support member in a lithographic apparatus is provided. The article support member is constructed and arranged to move and support an article to be placed in a beam path of the lithographic apparatus. The carriage includes a compartmented composite structure.