The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 05, 2007

Filed:

Nov. 20, 2003
Applicants:

Steven Kasapi, San Francisco, CA (US);

Amit Nabarro, Sunnyvale, CA (US);

Ofir Baharav, Los Altos Hills, CA (US);

Inventors:

Steven Kasapi, San Francisco, CA (US);

Amit Nabarro, Sunnyvale, CA (US);

Ofir Baharav, Los Altos Hills, CA (US);

Assignee:

Credence Systems Corporation, Milpitas, CA (US);

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03B 7/00 (2006.01); G01R 31/02 (2006.01);
U.S. Cl.
CPC ...
Abstract

A system and method for automatically and accurately determining the exact location of a knife-edge, such as an edge of an optical shutter, so that it can be controlled automatically. In one aspect the system comprises a mechanized shutter coupled to a shutter controller that can automatically control the shutter's location and movement. According to one implementation of the shutter controller the system takes a first image at a first shutter position. The shutter is then moved a predetermined about and a second image is taken. Then, the pixels of each image are added in the direction perpendicular to the movement of the shutter, so as to provide two one-dimension functions. A linear difference of the functions is then taken, so as to obtain a one-dimensional linear difference function. A peak in the linear difference function is then identified as the location of the shutter.


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