The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 29, 2007
Filed:
May. 12, 2005
Applicants:
Yasuhito Sasaki, Utsunomiya, JP;
Yoshikazu Miyajima, Utsunomiya, JP;
Hitoshi Sato, Utsunomiya, JP;
Katsumi Asada, Utsunomiya, JP;
Hideo Tanaka, Utsunomiya, JP;
Inventors:
Yasuhito Sasaki, Utsunomiya, JP;
Yoshikazu Miyajima, Utsunomiya, JP;
Hitoshi Sato, Utsunomiya, JP;
Katsumi Asada, Utsunomiya, JP;
Hideo Tanaka, Utsunomiya, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/42 (2006.01); G03B 27/58 (2006.01); H02K 41/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A stage device including a movable stage, a plate-like base which supports the stage, and a mass body which moves to cancel a reaction force acting on the base according to a movement of the movable stage. The plate-like base has a plurality of surfaces, and the stage and mass body are supported by different ones of the surfaces of the plate-like base.