The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 29, 2007
Filed:
May. 12, 2004
Yasuhiko Nara, Hitachinaka, JP;
Masaaki Nojiri, Hitachinaka, JP;
Kouichi Hayakawa, Hitachinaka, JP;
Hiroyuki Shinada, Mitaka, JP;
Yukio Hagita, Hitachinaka, JP;
Yasuhiko Nara, Hitachinaka, JP;
Masaaki Nojiri, Hitachinaka, JP;
Kouichi Hayakawa, Hitachinaka, JP;
Hiroyuki Shinada, Mitaka, JP;
Yukio Hagita, Hitachinaka, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
In a circuit pattern inspection apparatus, while an electron beam is irradiated onto a surface of a substrate having a plurality of chips where circuit patterns have been formed, a signal produced from the irradiated substrate is detected so as to form an image, and then, the formed image is compared with another image in order to detect a defect on the circuit patterns. Before the electron beam is irradiated onto either the chip or the plurality of chips so as to acquire the image for an inspection purpose, an electron beam is previously irradiated onto the region to be irradiated, so that charging conditions of the substrate to be inspected are arbitrarily controlled.