The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 08, 2007
Filed:
Aug. 13, 2004
Sang H. Lee, Sunnyvale, CA (US);
Yashesh A. Shroff, Santa Clara, CA (US);
Christof G. Krautschik, Cupertino, CA (US);
Sang H. Lee, Sunnyvale, CA (US);
Yashesh A. Shroff, Santa Clara, CA (US);
Christof G. Krautschik, Cupertino, CA (US);
Intel Corporation, Santa Clara, CA (US);
Abstract
In one embodiment of the present invention, thermal deformation or bending of membranes in a transition radiation emitting structure can be reduced by providing flex regions in the membranes or the membrane support structures. In a second embodiment, deformation of membranes is compensated for by fabricating the membranes to cooperatively bend in a similar manner and direction. In a third embodiment, deformation of the membrane is reduced by fabricating the membranes with an intrinsic tensile or compressive stress.