The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 01, 2007
Filed:
Feb. 18, 2005
Bryan W. Guenther, Tucson, AZ (US);
Erik L. Novak, Tucson, AZ (US);
Bryan W. Guenther, Tucson, AZ (US);
Erik L. Novak, Tucson, AZ (US);
Veeco Instruments Inc., Tucson, AZ (US);
Abstract
An interferometric profiler includes an opening adapted to receive a removable compensating element in the reference arm. The compensating element is mounted on a holder adapted for slidable engagement within the opening. A retaining mechanism keeps the holder firmly in place in the opening. The reference mirror of the profiler is mounted on a slidable stage urged away from the compensating element by a spring-loaded mechanism. A knob is provided to manually push the stage inward to its operating position proximate to the compensating element. A stop ensures that the travel of the stage is limited to a safe distance from the compensating element and a lock is provided to releasably hold the stage in place during use. Multiple objectives with different magnifications may be coupled to the module for alternative use according to the needs of particular applications. An illumination module may also be coupled to the reference-arm module.