Planarity diagnostic system, e.g., for microelectronic component test systems

Abstract

Methods of verifying planarity of a microelectronic component support of a microelectronic component test system with respect to a head of the test system are disclosed herein. In one embodiment, a method includes juxtaposing a probe card with a contact surface that is carried by the microelectronic, component support. The probe card has probes extending toward the contact surface. The method further includes changing a distance along a Z axis between the probe card and the contact surface and recording in a first data set a Z coordinate of the contact surface at which each probe changes a contact condition with respect to a first location on the contact surface. The method also includes spacing the probes from the contact surface, and translating at least one of the probe card and the contact surface with respect to an X-Y plane. Thereafter, the method includes changing a distance along the Z axis between the probe card and the contact surface and recording in a second data set a Z coordinate of the contact surface at which each probe changes a contact condition with respect to a second location on the contact surface which is spaced from the first location, and processing the first data set and the second data set with a processor of the test system to determine a planarity characteristic.