The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 01, 2007
Filed:
Sep. 24, 2004
Applicant:
Helmut Müller, Schwäbisch Gmünd, DE;
Inventor:
Helmut Müller, Schwäbisch Gmünd, DE;
Assignee:
Carl Zeiss NTS GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 37/20 (2006.01);
U.S. Cl.
CPC ...
Abstract
A particle beam apparatus has a cooled anti-contaminator () and/or a cooled specimen holder (). A thermal conductor () is provided for providing a connection between the anti-contaminator () and/or the specimen holder (), on the one hand, and the cooler () of a cryogen vessel () on the other hand. The thermal conductor () includes a carbon fiber bundle. With the carbon fiber bundle (), a high thermal conductivity is ensured between the cooler () and the surface () to be cooled. At the same time, thermal expansions are avoided which lead to a displacement of the anti-contaminator () and/or the specimen holder ().