The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 01, 2007
Filed:
Mar. 13, 2003
Young-ki Lee, Gyeonggi-do, KR;
Heon-jong Shin, Gyeonggi-do, KR;
Hwa-sook Shin, Gyeonggi-do, KR;
Samsung Electronics Co., Ltd., Kyungki-Do, KR;
Abstract
Methods of forming MOS transistors include forming lightly and heavily doped source/drain regions adjacent to one another in a substrate and a gate electrode with a sidewall spacer thereon. A salicide process is performed on a surface of the heavily doped source/drain region to provide a first suicide layer self-aligned to the sidewall spacer. At least a portion of the sidewall spacer is removed to expose a portion of the lightly doped source/drain region adjacent to the first silicide layer. A salicide process in performed on the exposed portion of the lightly doped source/drain region to provide a second silicide layer adjacent to the first suicide layer. Related devices are also disclosed.