The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 01, 2007

Filed:

Jul. 25, 2005
Applicants:

Gowrishankar L. Chindalore, Austin, TX (US);

Paul A. Ingersoll, Austin, TX (US);

Criag T. Swift, Austin, TX (US);

Inventors:

Gowrishankar L. Chindalore, Austin, TX (US);

Paul A. Ingersoll, Austin, TX (US);

Criag T. Swift, Austin, TX (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/336 (2006.01); H01L 29/76 (2006.01);
U.S. Cl.
CPC ...
Abstract

A process for forming an electronic device can include forming a first trench within a substrate, wherein the trench includes a wall and a bottom and extends from a primary surface of the substrate. The process can also include forming discontinuous storage elements and forming a first gate electrode within the trench such that, a first discontinuous storage element of the discontinuous storage elements lies between the first gate electrode and the wall of the trench. The process can further include removing the discontinuous storage elements that overlie the primary surface of the substrate. The process can still further include forming a second gate electrode that overlies the first gate electrode and the primary surface of the substrate.


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