The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 01, 2007
Filed:
Sep. 30, 2003
Keiji Ishibashi, Fuchu, JP;
Masahiko Tanaka, Fuchu, JP;
Minoru Karasawa, Fuchu, JP;
Hideki Sunayama, Fuchu, JP;
Kazutaka Yamada, Fuchu, JP;
Hideki Matsumura, Kanazawa, JP;
Atsushi Masuda, Kanazawa, JP;
Keiji Ishibashi, Fuchu, JP;
Masahiko Tanaka, Fuchu, JP;
Minoru Karasawa, Fuchu, JP;
Hideki Sunayama, Fuchu, JP;
Kazutaka Yamada, Fuchu, JP;
Hideki Matsumura, Kanazawa, JP;
Atsushi Masuda, Kanazawa, JP;
Anelva Corporation, Fuchu-Shi, Tokyo, JP;
Abstract
A heating element CVD system wherein one or a plurality of connection terminal holders is placed in the processing container, and each of the connection terminal holders holds a plurality of connection terminals. Each of the connection terminals connects the heating element to the electric power supply mechanism electrically such that a connection region of the heating element connected to the connection terminal is not exposed to a space in the processing container.