The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 24, 2007
Filed:
Oct. 11, 2005
Ko-hsing Chang, Hsinchu, TW;
Wu-tsung Chung, Miaoli County, TW;
Tsung-cheng Huang, Hsinchu, TW;
Powerchip Semiconductor Corp., Hsinchu, TW;
Abstract
A split gate flash memory is provided. Trenches are formed in the substrate to define active layers. The device isolation layers are formed in the trenches. The surface of the device isolation layers is lower than the surface of the active layers. The stacked gate structures each including a tunneling dielectric layer, a floating gate and a cap layer are formed on the active layers. The inter-gate dielectric layers are formed on the sidewalls of the stacked gate structures. The select gates are formed on one side of the stacked gate structure and across the active layer. The select gate dielectric layers are formed between the select gates and the active layers. The source regions are formed in the active layers on the other side of the stacked gate structures. The drain regions are formed in the active layers on one side of the select gates.