The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 24, 2007
Filed:
Sep. 19, 2003
Takashi Tanahashi, Tokyo-To, JP;
Takanobu Asano, Tokyo-To, JP;
Ken Nakao, Tokyo-To, JP;
Katsuhiro Yamashita, Tokyo-To, JP;
Takashi Tanahashi, Tokyo-To, JP;
Takanobu Asano, Tokyo-To, JP;
Ken Nakao, Tokyo-To, JP;
Katsuhiro Yamashita, Tokyo-To, JP;
Tokyo Electron Limited, Tokyo, JP;
Nichias Corporation, Tokyo-To, JP;
Abstract
Two rotorseach housing a honeycomb structurecarrying an absorbent is driven for rotation by a common motor. Partitioning membersdefine an absorbing zone S and a recovery zone U in the rotor depending on the angular positional relationship between the partitioning membersand the rotor corresponding thereto. In the absorbing zone S, the absorbent removes moisture and organic matters from air passing therethrough. In the recovery zone U, recovery of the absorbent deteriorated by absorbing the moisture and the organic matters is preformed by using heated dry air. Air sucked from a transfer spaceof the processing system sequentially passes through the absorbing zones of both the rotors via a circulation passage, thereafter returned to the transfer space. A part of clean dry air having passed through the absorbing zones of both the rotors is supplied into an exhaust passage, and is heated by a heater, and passes through the recovery zones of both the rotors.