The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 17, 2007
Filed:
Nov. 29, 2005
Applicants:
Ming-feng Ou, Hsinchu, TW;
Gwo-chiang Fang, Pingjhen, TW;
Chao-fan Chang, Hsinchu, TW;
Ju-kau Chen, Changhua, TW;
Oliver Wu, Nanjhuang Township, Miaoli County, TW;
Inventors:
Ming-Feng Ou, Hsinchu, TW;
Gwo-Chiang Fang, Pingjhen, TW;
Chao-Fan Chang, Hsinchu, TW;
Ju-Kau Chen, Changhua, TW;
Oliver Wu, Nanjhuang Township, Miaoli County, TW;
Assignee:
Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06F 19/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
Computer-implemented wafer-based planning methods for batch-based processing tools. Tool groups are appended in a tool group level of planning data provided by a MES for converting planning data from batch-based to wafer-based data. The planning data with appended tool group is applied to dispatch processing tools.