The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 17, 2007
Filed:
Sep. 14, 2005
Method of correcting chromatic aberrations in charged-particle beam and charged-particle beam system
Applicant:
Shinobu Uno, Tokyo, JP;
Inventor:
Shinobu Uno, Tokyo, JP;
Assignee:
Jeol Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/22 (2006.01);
U.S. Cl.
CPC ...
Abstract
Method and system for correcting chromatic aberrations in a charged-particle beam for automated correction of chromatic aberrations. The system directs a part of the charged-particle beam as a probe at a specimen. The system includes an extraction unit for extracting probe profiles from scanned images created by the beam, a chromatic aberration calculator for calculating chromatic aberrations in the system from the extracted probe profiles, and a correction unit for operating a chromatic aberration corrector based on the calculated chromatic aberrations.