The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 03, 2007
Filed:
Aug. 29, 2003
Applicants:
Karl Hornik, Kanagawa-ken, JP;
Rainer Bruchhaus, Kanagawa-ken, JP;
Nicolas Nagel, Kanagawa-ken, JP;
Inventors:
Assignee:
Infineon Technologies AG, Munich, unknown;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/108 (2006.01);
U.S. Cl.
CPC ...
Abstract
A process for the fabrication of a ferroelectric capacitor comprising depositing a layer of Tiover an insulating layerof AlO, and oxidising the Ti layer to form a TiOlayerSubsequently, a layer of PZTis formed over the TiOlayerThe PZT layeris subjected to an annealing step in which, due to the presence of the TiOlayerit crystallises to form a layerwith a high degree of (111)-texture.