The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 03, 2007
Filed:
Jun. 30, 2004
Karl Hornik, Hopewell Junction, NY (US);
Rainer Bruchhaus, Munich, DE;
Bum-ki Moon, Poughkeepsie, NY (US);
Karl Hornik, Hopewell Junction, NY (US);
Rainer Bruchhaus, Munich, DE;
Bum-Ki Moon, Poughkeepsie, NY (US);
Infineon Technologies AG, Munich, DE;
Abstract
In a process for fabricating a ferrocapacitor comprising providing ferroelectric PZT elements over an AlOlayer, the AlOlayer is covered with a seed layer comprising layers of PZT and TiO. Then a thicker layer of PZT is formed over the seed layer and crystallized. By this process, the crystallinity of the thick PZT layer is much improved, and its orientation is improved to be in the (111) direction. Furthermore, the seed layer reduces downward diffraction of Pb from the thick PZT layer, such as through the AlOinto a TEOS structure beneath.