The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 27, 2007
Filed:
Aug. 27, 2004
Stefan Schneidewind, Reichenberg, DE;
Claus Dietrich, Sacka, DE;
Frank-michael Werner, Dresden, DE;
Don Feuerstein, Southbury, CT (US);
Mike Lancaster, Williston, VT (US);
Denis Place, Williston, VT (US);
Stefan Schneidewind, Reichenberg, DE;
Claus Dietrich, Sacka, DE;
Frank-Michael Werner, Dresden, DE;
Don Feuerstein, Southbury, CT (US);
Mike Lancaster, Williston, VT (US);
Denis Place, Williston, VT (US);
SUSS MicroTec Testsystems (GmbH), Dresden, DE;
Abstract
An apparatus for testing substrates reduces the area required and the costs which arise with the testing of substrates, in particular semiconductor wafers, during the production process. The apparatus includes testing arrangements comprising a chuck, a chuck drive, control electronics, probe or probe board holding means with a handling system, a substrate magazine station and an alignment station. The testing arrangements include at least two testing arrangements, both of which are all jointly operatively connected to the handling system, the substrate magazine station and the alignment station.