The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 27, 2007
Filed:
Jul. 21, 2004
Stephane Monfray, Grenoble, FR;
Pascal Ancey, Revel, FR;
Thomas Skotnicki, Crolles Montfort, FR;
Karim Segueni, Grenoble, FR;
Stephane Monfray, Grenoble, FR;
Pascal Ancey, Revel, FR;
Thomas Skotnicki, Crolles Montfort, FR;
Karim Segueni, Grenoble, FR;
STMicroelectronics SA, Montrouge, FR;
Abstract
An electromechanical resonator includes a monocrystalline-silicon substrate (S) provided with an active zone (ZA) delimited by an insulating region, a vibrating beam () anchored by at least one of its free ends on the insulating region and including a monocrystalline-silicon vibrating central part (), and a control electrode (E) arranged above the beam and bearing on the active zone. The central part () of the beam is separated from the active zone (ZA) and from the control electrode (E).