The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 27, 2007
Filed:
Jan. 13, 2005
Chan-woo Cho, Gyeonggi-do, KR;
Jae-phil Boo, Gyeonggi-do, KR;
Myung-seok Kim, Gyeonggi-do, KR;
Jong-muk Kang, Gyeonggi-do, KR;
Ik-joo Kim, Gyeonggi-do, KR;
Jung-hwan Sung, Gyeonggi-do, KR;
Ki-hong Jung, Gyeonggi-do, KR;
Keon-sik Seo, Gyeonggi-do, KR;
Chan-Woo Cho, Gyeonggi-do, KR;
Jae-Phil Boo, Gyeonggi-do, KR;
Myung-Seok Kim, Gyeonggi-do, KR;
Jong-Muk Kang, Gyeonggi-do, KR;
Ik-Joo Kim, Gyeonggi-do, KR;
Jung-Hwan Sung, Gyeonggi-do, KR;
Ki-Hong Jung, Gyeonggi-do, KR;
Keon-Sik Seo, Gyeonggi-do, KR;
Samsung Electronics Co., Ltd., Suwon-si, KR;
Abstract
The present invention relates to a polishing apparatus for polishing a workpiece such as a semiconductor wafer to a flat mirror finish, and more particularly to a polishing apparatus having a workpiece transfer robot for transferring a workpiece from one operation to the next. The polishing apparatus according to the present invention comprises a polishing section including a top ring for holding a workpiece to be polished and a turntable having a polishing surface for polishing a surface of the workpiece held by the top ring; a cleaning section including a cleaning device for cleaning the workpiece that has been polished in the polishing section; and a workpiece transfer robot for transferring the workpiece to be polished to the polishing section or for transferring the workpiece that has been polished to the cleaning section. In this case, the workpiece transfer robot comprises a robot body; at least one arm operatively coupled to the robot body by at least one joint; a holder mechanism mounted on the arm for holding the workpiece; and a seal mechanism at the joint for preventing liquid from entering an interior of the joint, the seal mechanism.