The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 27, 2007
Filed:
Dec. 12, 2003
Applicants:
Dmitry Znamensky, Darien, IL (US);
Alan Zdunek, Chicago, IL (US);
Inventors:
Dmitry Znamensky, Darien, IL (US);
Alan Zdunek, Chicago, IL (US);
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F16K 11/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
Complex fluidic micro electromechanical systems (MEMS) are incorporated into high purity chemical delivery systems, while maintaining valve sealing integrity, quality and performance of the system. In particular, fluidic MEMS systems are incorporated into high purity chemical delivery systems for semiconductor fabrication processes.