The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 20, 2007
Filed:
Feb. 09, 2004
Applicant:
Detlef Michelsson, Wetzlar-Naunheim, DE;
Inventor:
Detlef Michelsson, Wetzlar-Naunheim, DE;
Assignee:
Vistec Semiconductor Systems GmbH, Weilburg, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
The invention is based on a method and an apparatus for scanning a semiconductor wafer (), on-the-fly images of regions on the wafer being acquired using a camera (). Upon a scan line changeover, a continuously curved displacement track is generated by at least partial superimposition of the relative motions between the wafer () and camera () in the direction of the scan lines and perpendicular thereto. As a result, time is saved and wafer throughput is increased.